发明名称 BAKING APPARATUS
摘要 A baking apparatus is provided to shorten a time interval of baking plenty of processed articles by installing processed articles of the same size in parallel. A heating unit is installed in a chamber for baking a processed article(100) wherein an insertion hole is formed at one side of the chamber and an exhaust hole is formed at the other side of the chamber. A palette(30) installs or collects the processed article, circulating to the inside and outside through the insertion hole and the exhaust hole. The palette includes a lower plate having a slot(32) and a plurality of install bars(40) formed on the upper surface of the lower plate to be positioned in a direction perpendicular to the slot wherein the install bars form pairs to install the processed article. The install bar includes a plurality of fixed install bars fixed to the upper surface of the lower plate and a plurality of transferred install bars coupled to a slide member(47) capable of being transferred along the slot. A gap between the fixed install bar and the processed article is adjusted by the transfer of the transferred install bar so that processed articles of the same size are installed in parallel with each other. Protrusions of a step shape are lengthwise formed at the fixed and transferred install bars, confronting each other. Extension portions are formed at both ends of the protrusions, slanting in directions of its bottom and lateral surfaces.
申请公布号 KR20080088862(A) 申请公布日期 2008.10.06
申请号 KR20070031693 申请日期 2007.03.30
申请人 A-GIN CO., LTD. 发明人 CHO, SANG MAN
分类号 H01L21/00;H01L21/02 主分类号 H01L21/00
代理机构 代理人
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