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发明名称
TRIPLE LEVEL SELF-ALIGNED METALLURGY FOR SEMICONDUCTOR DEVICES
摘要
申请公布号
EP0463365(A3)
申请公布日期
1993.06.09
申请号
EP19910108402
申请日期
1991.05.24
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
CRONIN, JOHN EDWARD;KAANTA, CARTER WELLING
分类号
H01L21/28;H01L21/3205;H01L21/768;H01L23/52;(IPC1-7):H01L21/90;H01L21/60
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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