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发明名称
HALBLEITERBEHANDLUNGSVORRICHTUNG.
摘要
申请公布号
DE3687795(T2)
申请公布日期
1993.06.09
申请号
DE19863687795T
申请日期
1986.11.18
申请人
SHIMIZU CONSTRUCTION CO., LTD., TOKIO/TOKYO, JP
发明人
HARADA, HIROSHI;IWASAWA, YOSHIYUKI;ISHIDA, TSUTOMU;KOBAYASHI, SHINTARO, TOKYO, JP
分类号
H01L21/02;H01L21/22;H01L21/677;(IPC1-7):H01L21/00
主分类号
H01L21/02
代理机构
代理人
主权项
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