STRUCTURE FOR A RESONATOR USING AN ULTRATHIN PIEZOELECTRIC SUBSTRATE

摘要

PCT No. PCT/JP90/01273 Sec. 371 Date Oct. 7, 1991 Sec. 102(e) Date Oct. 7, 1991 PCT Filed Oct. 2, 1990 PCT Pub. No. WO91/12662 PCT Pub. Date Aug. 22, 1991.In a resonator which has an ultrathin vibratory portion formed integrally with a thick frame-like rib surrounding it, a pair of opposed thick marginal portions of the frame-like rib are formed so that their widths gradually decreases toward another marginal portion of the rib from the other remaining one perpendicular to the above-noted pair of opposed marginal portions and to be fixed to a resonator case. This structure substantially increases the mechanical strength of the piezoelectric resonator, even if it is held in a cantilever fashion, and protects it from breakage by an external vibration or shock.