APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR CLEANING NOZZLE THEREOF,申请号KR20070058240-传众专利搜索

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发明名称	APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR CLEANING NOZZLE THEREOF
摘要
申请公布号	KR100895030(B1)	申请公布日期	2009.04.24
申请号	KR20070058240	申请日期	2007.06.14
申请人		发明人
分类号	H01L21/08;H01L21/027	主分类号	H01L21/08
代理机构		代理人
主权项
地址

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