Serial pumping for portable handling tool of electronic workpieces

摘要

A battery-powered portable tool for handling electronic workpieces, such as semiconductor wafers, wherein a desired pressure differential is generated by a serial connection of vacuum pumps. The tool includes a number of features which minimize the generation of particulate matter. The pumps are sealed in an airtight chamber to prevent the release of particles created during operation of the pumps. The tool is exhausted directly to the ambient atmosphere to prevent pump exhaust from disturbing particles within the tool. The valve is designed to provide a quick release of even lightweight workpieces and to minimize the sliding of valve components against each other. Submicron filtering removes any particles from the pump exhaust.