发明名称 SENSOR DEVICE
摘要 <p>PURPOSE:To improve precision in positioning a sensor element in a measuring atmosphere and also to prevent turbulence of the measuring atmosphere in measurement and thereby to improve measuring precision. CONSTITUTION:A recessed part 3 in which a flow rate sensor chip 2 is fitted is formed in a base plate 1, with the depth of the recessed part 3 set to be equal to the thickness of the flow rate sensor chip 2, so that the two diagonal lines of the recessed part 3 are parallel and perpendicular to the edge side parts of the base plate 1. On the occasion when a flow rate sensor 6 having the flow rate sensor chip 2 fitted in the recessed part 3 of the base plate 1 is fitted to a fluid passage part, according to this constitution, the flow rate sensor chip 2 can be positioned at a prescribed position at which the precision in measurement of a flow rate is excellent in respect to the flowing direction of a fluid to be measured.</p>
申请公布号 JPH05142008(A) 申请公布日期 1993.06.08
申请号 JP19910303610 申请日期 1991.11.19
申请人 TOKICO LTD 发明人 HIRATA YOZO
分类号 G01F1/00;G01F1/68;G01F1/692;G01F15/18;G01P5/10;G01P5/12 主分类号 G01F1/00
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