摘要 |
<p>PURPOSE:To improve precision in positioning a sensor element in a measuring atmosphere and also to prevent turbulence of the measuring atmosphere in measurement and thereby to improve measuring precision. CONSTITUTION:A recessed part 3 in which a flow rate sensor chip 2 is fitted is formed in a base plate 1, with the depth of the recessed part 3 set to be equal to the thickness of the flow rate sensor chip 2, so that the two diagonal lines of the recessed part 3 are parallel and perpendicular to the edge side parts of the base plate 1. On the occasion when a flow rate sensor 6 having the flow rate sensor chip 2 fitted in the recessed part 3 of the base plate 1 is fitted to a fluid passage part, according to this constitution, the flow rate sensor chip 2 can be positioned at a prescribed position at which the precision in measurement of a flow rate is excellent in respect to the flowing direction of a fluid to be measured.</p> |