| 摘要 |
PURPOSE:To position two objects to be measured and measure the gap between two objects by providing an optical means for optical processing and an image acquiring means for light reception processing, and generating both the incoherent illumination light and the coherent illumination light. CONSTITUTION:For positioning the first object 15A and the second object 15B, the incoherent illumination light L11 is radiated along the optical axis C of an optical, means 13. When the coherent illumination light L12 is generated, both the illumination light L11 and the illumination light L12 are deflected to the direction of a measured subject 15 by the optical means 13. The first and second images L21, L22 fed-back front the measured subject 15 are optically processed by the optical means 13, and both images are light-reception-processed by an image acquiring means 14. Refraction fringes are generated on the surface of the object 15A by a refraction grid G, the relative position between the image L22 and a positioning mark M provided on the object 15A is calculated, and both objects 15A, 15B can be positioned. The refraction fringes generated by the grid G are image-processed to measure the gap between both objects 15A, 15B. |
