THIN FILM FORMING APPARATUS,申请号JP19910331562-传众专利搜索

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发明名称	THIN FILM FORMING APPARATUS
摘要
申请公布号	JPH05140745(A)	申请公布日期	1993.06.08
申请号	JP19910331562	申请日期	1991.11.21
申请人	HITACHI LTD;NIKKO KYODO CO LTD	发明人	YAMAMOTO MASASHI;BAN KAZUHIRO;KANAO SHINICHI;SAWADA SUSUMU;SUMIYA YOSHITAKA;WADA HIRONORI
分类号	C23C16/44	主分类号	C23C16/44
代理机构		代理人
主权项
地址

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