ATOMIC BEAM IMPLANTING DEVICE,申请号JP19910306301-传众专利搜索

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发明名称	ATOMIC BEAM IMPLANTING DEVICE
摘要
申请公布号	JPH05140742(A)	申请公布日期	1993.06.08
申请号	JP19910306301	申请日期	1991.11.21
申请人	EBARA CORP	发明人	NAGAI KAZUTOSHI;NISHIFUJI MUTSUMI
分类号	C23C14/48;C23C14/54;H01J37/317;H01L21/203	主分类号	C23C14/48
代理机构		代理人
主权项
地址

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