| 摘要 |
<p>PURPOSE:To enable measurement of a minute flow rate without making a pressure loss larger than a prescribed value, by dividing a flow passage of a nozzle by a flow- dividing plate into a first flow passage wherein a sensing chip projects and a second flow passage and by providing a straightening member upstream only for the second flow passage. CONSTITUTION:A nozzle 4 is divided by a flow-dividing plate 15 into a first flow passage 4A and a second flow passage 4B and a sensing chip 5a projects in the flow passage 4A. A straightening plate 8 is provided only on the upstream side of the flow passage 4B. The flow-dividing plate 15 and the straightening plate 8 are fixed to the main body 1 of a flow passage by fitting. A gas passing through a straightening member located upstream is divided by the flow-dividing plate 15. A part thereof passes through the flow passage 4A and the velocity of the flow is measured by the chip 5a. Most of the gas flows through the straightening plate 8 and the flow passage 4B and the gas of the two flow passages flows to a fluidic oscillation element 2, causing fluidic oscillation. According to this constitution, the gas passing through the flow passage 4A is not subjected to the resistance of the straightening plate 8, the velocity of the flow becomes large therefore, an output pulse of a flow sensor 5 increases and thus a minute flow rate can be detected reliably.</p> |
