METHOD FOR EVALUATING INTERFACE OF SAMPLE,申请号JP19910188478-传众专利搜索

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发明名称	METHOD FOR EVALUATING INTERFACE OF SAMPLE
摘要
申请公布号	JPH05142147(A)	申请公布日期	1993.06.08
申请号	JP19910188478	申请日期	1991.07.29
申请人	RIKAGAKU KENKYUSHO;RATOTSUKU SYST ENG KK	发明人	RIKU TAISHIN;OGAWA TOMOYA;TOYODA KOICHI;NANGOU NAGAFUMI
分类号	G01B11/06;G01B11/30;G01N21/00;G01N21/47;H01L21/66	主分类号	G01B11/06
代理机构		代理人
主权项
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