THREE DIMENSIONAL ACCELERATION SENSOR

摘要

PURPOSE:To obtain a three dimensional acceleration sensor capable of detecting very small acceleration to large one due to crash reaching 100G. CONSTITUTION:Monocrystal silicone 1 is fabricated to form a diaphragm part (B) 4 connecting a frame part 3 and a mass part 5, a diaphragm (A) 6 connecting the mass part 5 and the center 9 and a beam part 10. By detecting the change in capacity between electrode parts 7 facing to the mass part 5 which is displaced by acceleration to the mass part 5, the direction and the level of impressed acceleration are judged by a circuit constituting the sensor. The acceleration is detected by a circuit connected to a terminal part 8.