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发明名称
UNIT AND METHOD FOR GROWING SINGLE CRYSTAL
摘要
申请公布号
JPH05139879(A)
申请公布日期
1993.06.08
申请号
JP19910355510
申请日期
1991.11.22
申请人
SUMITOMO METAL IND LTD
发明人
MIYAHARA SHUNJI;KOBAYASHI SUMIO;FUJIWARA TOSHIYUKI;KUBO TAKAYUKI;FUJIWARA HIDEKI;INAMI SHUICHI
分类号
C30B15/14;H01L21/208
主分类号
C30B15/14
代理机构
代理人
主权项
地址
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