摘要 |
<p>Films are coated on substrates, useful for applications such as packaging, having a substantially continuous inorganic matrix in which organosilicon moieties are discontinuously dispersed. The inorganic matrix can be formed by evaporating an inorganic source within an evacuated chamber while at the same time flowing vaporized organosilicon into the chamber adjacent to an electrically isolated substrate. <IMAGE></p> |