摘要 |
PURPOSE:To enable the measurement and estimation of spectral characteristic of a color filter alone when the color filter is formed and adhered on the photo detecting face of the solid imaging element by a method wherein a measuring region having the color filter is provided at the same time in a part of the region at the outside of the effective imaging region of the element. CONSTITUTION:Plural transfer electrodes 5 and transfer regions 6 locating on them are formed on a substrate 1, plural photodetecting parts 4 are provided placing the electrodes 5 and the regions 6 between them, colored filters 7G, 7R, 7B are adhered in order on them and is covered with a color filter 7 putting a transparent isolating layer 8 between them to constitute a solid imaging element for CCD, etc. In this constitution, an exclusive measuring region 3 to measure and estimate the spectral characteristic of the filter is newly added at a part of the outer circumference of the substrate 1 surrounding an effective imaging region 2 covered with the filter 7, and a photo sensor having regions corresponding to the color components of the filter 7 is formed at this place. By this way, the spectral characteristic of the filter 7 is measured by the sensor, and the estimation is simplified. |