Method of forming an isolation region comprising a trench isolation region and a selective oxidation film involved in a semiconductor device.

摘要

The present invention provides a novel method of forming an isolation region comprising a trench isolation region and a selective oxidation film region (9) involved in a semiconductor integrated circuit device. A silicon oxide film (5) is deposited on a surface of a trench groove formed within a semiconductor bulk (1, 2, 3), followed by a deposition of a polycrystalline silicon material (6). The silicon oxide film (5) within the trench groove is subjected to etching up to a predetermined depth so as to form a hollow portion. A polycrystalline silicon film (7) is deposited within the hollow portion and on both surfaces of the polycrystalline silicon material (6) and the semiconductor bulk (1, 2, 3). The polycrystalline silicon film (7) within the hollow portion, the polycrystalline silicon material (6) and the semiconductor bulk (1, 2, 3) in the vicinity of the trench groove is subjected to selective oxidation so as to form a selective oxidation film region (9). It is also permissive that a silicon nitride film (10) is deposited on the silicon oxide film (5) covering the surface of the trench groove prior to the deposition of the polycrystalline silicon material (6).