| 摘要 |
PURPOSE:To provide a photomask housing case which ensures that a photomask is taken out from the phtomask housing case and it can be set, without reset ting, to a projecting exposure apparatus and a fault inspection apparatus because a large amount of dust is adhered and working efficiency has also been bad at the time of loading or unloading the photomaks to and from the photomask housing case. CONSTITUTION:Two opening areas are provided to a photomask housing case, a door 101 can be opened upward, while a door 111 can be opened downward. Moreover, a photomask holding pin 105 is attracted with a contraction of a spring 103 to hold the photomask 106. Moreover, when the doors are opened, the spring 103 is pulled, the photomask 106 holding pin 105 moves upward for the unlocking and the photomask can be taken out. |
