VIBRATING TYPE TRANSDUCER AND MANUFACTURING PROCESS THEREOF

摘要

This invention relates to a vibrating type transducer wherein an H-shaped vibrator formed integrally with a silicon substrate and having a hollow chamber provided around is kept self-oscillating on its natural frequency together with an amplifier, a physical quantity such as force, pressure, differential pressure or the like which is applied to the silicon substrate is detected from a change in the natural frequency arising on the vibrator correspondingly to such physical quantity, a process for manufacturing such vibrating type transducer through a semiconductor technique, a process for keeping the hollow chamber vacuum internally, a construction for giving an initial tension to the vibrator, and a construction of the amplifier operating for self-oscil-lation stably.