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发明名称
SELF-ALIGNED CONTACT STUDS FOR SEMICONDUCTOR STRUCTURES
摘要
申请公布号
US5216282(A)
申请公布日期
1993.06.01
申请号
US19910784193
申请日期
1991.10.29
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
COTE, DONNA R.;STANASOLOVICH, DAVID;WARREN, RONALD A.
分类号
H01L21/28;H01L21/3105;H01L21/336;H01L21/60;H01L21/768;H01L23/48;H01L23/522;H01L29/78
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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