| 摘要 |
PURPOSE:To improve the accuracy of optical axis adjustment by receiving the diffracted light past a slit with divided detectors, outputting this light as an electric signal group and making the optical axis adjustment by judging a mis-alignment direction from the breaking of the balance. CONSTITUTION:A laser beam 5 is passed through the rectangular slit 1 and is made into the diffracted light 6. This diffracted light 6 is received by the quadrisected detectors 2. The deviation in the optical axis is judged by using the difference signals of the detection signals from the right, left, upper, and lower light receiving elements of the detectors 2. This measuring means has a large change with the mis-alignment of the optical axis and the optical axis adjustment is executed with good accuracy. |
