| 摘要 |
PURPOSE:To provide a method for production of the Ni stamper having good flatness and a pattern transfer method by which patterns are well transferred with a smaller number of stages in a sol-gel method. CONSTITUTION:A reinforcing material 5 is stuck by using an anaerobic curing resin 4 onto a glass master disk 1 constituted of a resist layer 2 formed with fine patterns by a master writing system and an Ni layer 3 formed thereon by an electrocasting method, etc., and is then die-released, by which the Ni stamper is obtd. The rotary direction at the time of forming a master stamper is reversed (counterchorkwise) to the conventional rotary direction. The patterns are transferred by using a 2P molded substrate produced by using the Ni stamper stuck with the reinforcing material 5 as shown above as a work stamper for sol-gel transfer. |
