FORMATION OF CRYSTALLINE THIN FILM,申请号JP19910326792-传众专利搜索

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发明名称	FORMATION OF CRYSTALLINE THIN FILM
摘要
申请公布号	JPH05136055(A)	申请公布日期	1993.06.01
申请号	JP19910326792	申请日期	1991.11.15
申请人	CANON INC	发明人	SATO NOBUHIKO
分类号	H01L21/20;H01L21/304	主分类号	H01L21/20
代理机构		代理人
主权项
地址

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