| 摘要 |
The device comprises a container provided with a gas inlet 2 and a gas outlet 8, a cathode serving as substrate holder and connected to a HF voltage source, and an anode 3 of laminar construction and at earth potential. The surface of the anode comprises stepped zones 8 which are parallel to the cathode and which are arranged at different distances respectively from the cathode. The distance diminishes toward the gas outlet 6. <IMAGE> |
