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发明名称
PLASMA REACTOR
摘要
申请公布号
JPH05136093(A)
申请公布日期
1993.06.01
申请号
JP19910322501
申请日期
1991.11.11
申请人
RAMUKO KK
发明人
TAKASHIMA SHIGEKAZU;SAKAMOTO NORIO
分类号
C23C16/50;C23F4/00;H01L21/205;H01L21/302;H01L21/3065
主分类号
C23C16/50
代理机构
代理人
主权项
地址
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