| 摘要 |
PURPOSE:To carry out polishing in conformity with the actual polishing condition by detecting a polishing resistance from the output torque of a DD(direct drive) motor which directly drives a lap table, and controlling the DD motor on the basis of the detected polishing resistance. CONSTITUTION:A lap table 2 is directly driven by means of a DD motor 101, and the rotation of the DD motor 101 is detected by means of a rotation sensor 102 and received by a control part 11 in a polishing device where a work 1 held by a carrier 5 is pushingly pressed against the lap table 2 to achieve the polishing works. Conducting electricity to the DD motor 101 is controlled by means of this control part 11, and the output torque of the DD motor 101 is detected by a torque detecting means 13 on the basis of the excited current at that time. The polishing resistance is obtained by a polishing resistance detecting means 14 from the detected results of the output torque, leading to selection of polishing liquid supplying means 91... 9n to supply the polishing liquid whose abrasive grain size is different, or control of the DD motor 101. |
