| 摘要 |
PURPOSE:To measure the dimension of an opening accurately by automatically recognizing the surface of a detection monitor, and the shape of this detection monitor at the specified depth from the surface, and detecting the existence of the change of the image signal of the detection monitor. CONSTITUTION:An opening 2a is made in a resist film 2 made at the surface of a semiconductor substrate 1, and the cross section of a detection monitor, where the shape of the surface part of the semiconductor substrate 1 inside this opening is deformed, is shown in the figure. The surface of this detection monitor and the shape of this detection monitor at the specified depth from this surface are automatically recognized. And, the image signals of this detection monitor at the respective positions are detected and the existence of the change of this image signal is detected. Hereby, the accurate shape of this detection monitor can be recognized accurately. What is more, it becomes possible to accurately measure the dimension of the opening 2a of the resist film 2, etc., where the shape of the semiconductor substrate 1 has deteriorated. |
