发明名称 |
TRANSMISSIVE SYSTEM FOR CHARACTERIZING MATERIALS CONTAINING PHOTOREACTIVE CONSTITUENTS |
摘要 |
A transmissive system for characterizing the photochemical reactivity and solubility properties of materials, such as photoresist, that contain one or more photo-active constituents and that can be formed as films on optically-transparent substrates. The system operates to detect the intensity of light transmitted through the photo-active material and the optically-transparent substrate. Generally speaking, the system comprises: a) an optically-transparent substrate means for providing a substrate for a film formed of a material that contains one or more photo-active constituents; b) exposure means for transmitting at least one selected wavelength of light through at least one selected area of the film; and c) detection means for detecting the intensity of light transmitted through the film and optically-transparent substrate means.
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申请公布号 |
US5216487(A) |
申请公布日期 |
1993.06.01 |
申请号 |
US19910704091 |
申请日期 |
1991.05.22 |
申请人 |
SITE SERVICES, INC. |
发明人 |
DE BRUIN, DAVID C.;HANNIFAN, MARTIN R. |
分类号 |
G01B11/06;G01N21/27;G01N21/33;G01N21/59;G01N21/75;G01N21/84;G03F7/20 |
主分类号 |
G01B11/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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