| 摘要 |
<p>PURPOSE:To enhance measurement accuracy about the degree of evenness of each outer lead for TCP and each side and reduce inspection time compared with the prior art observation based on a microscope by using a measurement device having a mechanism which combines a laser displacement gauge and an operation stage. CONSTITUTION:A uniaxial stage 19 is transferred from B to A direction while an attempt is made to measure the distance between a laser array displacement gauge 1 and an outer lead of a TCP 28. After the measurement in that direction is over, a rotary stage 19 is rotated by 90 degrees and transferred in the direction of BC so as to collect the distance data from the displacement gauge 1 to the outer lead which is enough data to recognize the shape of each lead so that the collected data may be stored in an internal memory 8 in the CPU 9. Then, the maximum variability of a regression straight line for each outer lead and data about the regression straight line is calculated (signal lead evenness computing section 7) so as to determine the degree of evenness of each outer lead. From similar data about the sides, the degree of evenness of each side is determined by the same arithmetic operation (one side evenness degree computing section 9).</p> |
