AGING TEST PATTERN-PROVIDED SEMICONDUCTOR WAFER,申请号JP19910295701-传众专利搜索

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发明名称	AGING TEST PATTERN-PROVIDED SEMICONDUCTOR WAFER
摘要
申请公布号	JPH05136243(A)	申请公布日期	1993.06.01
申请号	JP19910295701	申请日期	1991.11.12
申请人	NIPPON ENG KK	发明人	KANEKO KAZUO
分类号	G01R31/26;H01L21/326;H01L21/66;H01L21/822;H01L27/04	主分类号	G01R31/26
代理机构		代理人
主权项
地址

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