METHOD AND EQUIPMENT FOR REPRODUCING AND UTILIZING PURE WATER OF ULTRA-PURE WATER

摘要

PURPOSE:To recover washing water in a washing stage wherein pure water or ultra pure water is used, to reproduce and utilize the washing water. CONSTITUTION:Pure water or ultra pure water is used in a washing stage 12. Washing waste water 15 of the washing stage 12 is regenerated and utilized. In this reproducing and utilizing method, reproducing treatment is performed by successively passing washing waste water 15 through the following respective stages (a)-(e). (a): a stage 1 for passing washing waste water 15 through an ion exchange resin layer. (b): a stage 2 for passing the treated water of (a) through a gas permeating membrane 3 carried with palladium and supplying hydrogen to the gas contact side. (c): a stage 8 for irradiating the treated water of (b) with ultraviolet rays. (d): a stage 9 for passing the treated water of (c) through an ion exchange resin layer mixed with H-type strong acidic cation exchange resin and OH-type anion exchange resin. (e): a stage 10 for ultrafiltrating the treated water of (d). The reproduced treated water 11 of (e) is circulated through the reproducing stages and the washing stage and utilized.