发明名称 |
Bridge electrodes for microelectromechanical devices |
摘要 |
A bridge electrode structure and method of fabrication thereof is provided that is adapted to provide electrically isolated metal bridges over the active portions of a monolithic micromechanical transducer. The bridge electrode of the invention is also adapted to operate in facing relationship with one or more buried electrodes, providing top-to-bottom symmetry for balanced application of forces, or motion detection when used in conjunction with transducer elements. The transducer, typically a gyroscope or an accelerometer, includes a semiconductor substrate and active elements etched out of the substrate, the active elements including flexure-supported transducer plates. The bridge electrodes are anchored at opposing points on the substrate's surface to metal layers used to facilitate their electro-forming. The central portions of the bridge are electroplated over an insulating spacer, such as a photoresist layer.
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申请公布号 |
US5216490(A) |
申请公布日期 |
1993.06.01 |
申请号 |
US19900562581 |
申请日期 |
1990.08.03 |
申请人 |
CHARLES STARK DRAPER LABORATORY, INC. |
发明人 |
GREIFF, PAUL;BERNSTEIN, JONATHAN J. |
分类号 |
B81B3/00;G01C19/56;G01P15/08 |
主分类号 |
B81B3/00 |
代理机构 |
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主权项 |
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地址 |
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