发明名称 Image developing method utilizing sodium sulfide and ammonium polysulfide developer solution whereby exposed copper substrate surface changes color
摘要 An image development method is disclosed. In the method, a photoresist layer on a metal surface is exposed for development. The developer then used is a solution which will both develop the photoresist image and cause any exposed metal surface to change to a predetermined color. The development process then proceeds until the predetermined color is exposed whereupon the process ceases. The preferred metal is copper and the preferred developer is an aqueous solution of sodium sulphide and ammonium polysulfide.
申请公布号 US5215865(A) 申请公布日期 1993.06.01
申请号 US19910758411 申请日期 1991.08.03
申请人 CHEN, RON-HON 发明人 CHEN, RON-HON
分类号 G03F7/30;G03F7/32 主分类号 G03F7/30
代理机构 代理人
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