| 摘要 |
PURPOSE:To contrive a full automation of baking and curing processes for a photoresist and to reduce a temperature change in an oven body at the time of loading of cassettes into the oven body and at the time of unloading of the cassettes from the body to shorten a temperature recovery time. CONSTITUTION:Cassettes 3 in a loading cassette station 1 are carrier in an oven body 8 by a transfer robot 5. A plurality of shell plates 10, which are coupled with the body 8 by a flexible chain 12 and are driven by a motor 14, are provided in the body 8. The lower part of the front surface of the body 8 is provided with a flat valve 7 which is opened at the time of carrying-in and carrying-out of the cassettes. The cassettes are set in order from the upper part of the shelf plate of the uppermost step and when the carrying-up of the cassettes ends, a baking (a curing) is performed. After the baking ends, the cassettes are carried-out from the interior of the body 8 to an unloading cassette station 2 by the robot 5. |
