发明名称 Method of making extended body contact for semiconductor over insulator transistor
摘要 A semiconductor over insulator transistor is provided preferably of a lightly doped drain ("LDD") profile. LDD transistor (74) includes a semiconductor mesa (76) formed over an insulating layer (94) which overlies a semiconductor substrate (96). Semiconductor mesa (76) includes a source region (78) and a drain region (80) at opposite ends thereof. A body node (82) is disposed between source and drain regions (78,80). A low resistance contact region (98) lies along substantially the entire width of body region (82) and contacts a vertical contact which permits electrical contact from the top surface of semiconductor mesa (76) to low resistance contact region (98). Low resistance contact region (98) may be extended to fully underlie source region (78) such that the vertical contact may be moved away from body node (82).
申请公布号 US5215931(A) 申请公布日期 1993.06.01
申请号 US19920919680 申请日期 1992.07.27
申请人 TEXAS INSTRUMENTS INCORPORATED 发明人 HOUSTON, THEODORE W.
分类号 H01L27/06;H01L29/786 主分类号 H01L27/06
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