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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH05136129(A)
申请公布日期
1993.06.01
申请号
JP19910293542
申请日期
1991.11.11
申请人
FUJITSU LTD
发明人
MAENOZONO TOSHIYUKI
分类号
H01L21/302;H01L21/3065;H01L21/3205;H01L21/3213
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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