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经营范围
发明名称
FLATTENING METHOD
摘要
申请公布号
JPH05136122(A)
申请公布日期
1993.06.01
申请号
JP19910326973
申请日期
1991.11.14
申请人
SANYO CHEM IND LTD
发明人
MATSUKA HIDEHIKO
分类号
H01L21/302;H01L21/3065;H01L21/312;H01L21/316
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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