发明名称 |
Method for producing salicide and a carbon nanotube metal contact |
摘要 |
A method for producing a metal contact in a semiconductor device is disclosed. The method comprises depositing a catalyst layer in a via hole, forming a catalyst from the deposited catalyst layer, and growing a carbon nanotube structure above the catalyst in the via hole. The method further comprises forming salicide from the catalyst, applying a chemical mechanical polishing (CMP) process to the carbon nanotube structure to remove top layers of catalyst and nanotube material, and depositing metal material above the carbon nanotube structure. Growing a carbon nanotube structure comprises absorbing a precursor on a surface of the catalyst formed in the via hole, forming a metal-carbon alloy from the catalyst and the precursor, and growing a carbon nanotube structure vertically from the via bottom. The carbon nanotube structure comprises a plurality of carbon nanotubes wherein the diameters of the carbon nanotubes are limited by the catalyst size. |
申请公布号 |
US9391023(B2) |
申请公布日期 |
2016.07.12 |
申请号 |
US201414180417 |
申请日期 |
2014.02.14 |
申请人 |
Taiwan Semiconductor Manufacturing Company Limited |
发明人 |
Lin Yu-Hung;Yeh Ching-Fu;Chang Chih-Wei |
分类号 |
H01L23/48;H05K7/02;B01J21/18;B82B1/00;H01L21/8234;H01L21/768;H01L23/532;H01L21/285;H01L21/3205;H01L23/485 |
主分类号 |
H01L23/48 |
代理机构 |
Jones Day |
代理人 |
Jones Day |
主权项 |
1. A method of producing a metal contact in a semiconductor device comprising:
depositing a catalyst material layer in a via hole; forming a catalyst from the catalyst material layer; growing a carbon nanotube structure using the catalyst in the via hole; forming a portion of salicide from the catalyst after the growth of the carbon nanotube structure; applying a chemical mechanical polishing (CMP) process to the carbon nanotube structure to remove top layers of catalyst and nanotube material; and depositing metal material above the carbon nanotube structure. |
地址 |
Hsinchu TW |