| 摘要 |
<p>PURPOSE:To improve the accuracy of detecting gaseous halogens with the gas discharging device and to prevent the outflow of waste gases contg. the gaseous halogens. CONSTITUTION:The gas discharging device which branches the waste gases from a piping, discharges the gases to the general atm. through a hydrofluoric acid detector 5 and closes the piping by the detection of the gaseous halogens with the hydrofluoric acid detector is provided with a mixing tank 8 on the upstream side of the hydrofluoric acid detector to admit the gases contg. hydrogen into the mixing tank and to accelerate the formation of the hydrofluoric acid, by which the accuracy in detecting the hydrofluoric acid is improved. An electromagnetic valve 11 operated by the hydrofluoric acid detection is provided on the downstream of the hydrofluoric acid detector to prevent the discharge of the gaseous halogens from the gas discharging device. A gaseous halogen adsorption chamber is provided on the downstream of the hydrofluoric acid detector to adsorb the gaseous halogens flowing through the gas discharging device.</p> |
