| 摘要 |
<p>PURPOSE: To improve high-corrosion resistance and a high-wear resistance by performing formation, using FeMn layer and at least one protection layer from among of nitride, carbide, and oxide that are formed on the surface of the FeMn layer by dual ion injection. CONSTITUTION: In a magnetic thin film 1, where a thin-film material layer 2 is adhered on a substrate 3, a protection layer that is selected from among nitride, carbide, and oxide is formed on the surface of FeMn layer, due to double ion injections 4 and 5 of a reactive element. In this case, as a combination of a type of reactive elements to be injected doubly, chromium and nitrogen, titanium and nitrogen, silicon and nitrogen, silicon and carbon, chromium and carbon, titanium and carbon, and aluminum and oxygen are available. Then, after the ion implantation of the reactive element, annealing is performed in an atmosphere or in a forming gas to prevent the magnetic characteristics of a magnetic body from being affected, thus obtaining a FeMn film with a high corrosion-resistance characteristic.</p> |
