| 摘要 |
PURPOSE:To secure long-term reliability preventing a mechanical shutter body from being heated, and to obtain long-term reliability of an O-ring by providing halfway between a partially transmitting mirror and a totally reflecting mirror, the mechanical shutter which moves a shading panel by moving a magnet arranged outside a vacuum container. CONSTITUTION:A mechanical shutter 49 is put in a laser resonator before a partially transmitting mirror. A laser oscillation is stopped by inserting the shading panel 2 of the shutter 49 on the optical axis L of the laser resonator, and a laser beam is not generated. Accordingly, the mechanical shutter 49 is not heated. The shading panel 2 of the mechanical shutter 49 for shading a laser beam is fitted to one end of its cylinder shaft 3, and an N- or S-pole magnet 5 is fitted to the other end. At the same time, a magnet 4 of the opposite pole to the magnet 5 is arranged separated by a vacuum container 1 outside the vacuum container 1. The shading panel 2 is moved forward or backward utilizing the suction force of the magnet 5 by moving the magnet 4 with an air cylinder 14. |
