发明名称 Tris-(hydroxyphenyl) lower alkane compounds as sensitivity enhancers for o-quinonediazide containing radiation-sensitive compositions and elements
摘要 A radiation-sensitive composition comprising an admixture in a solvent of: at least one alkali-soluble binder resin, at least one photoactive compound and an effective sensitivity enhancing amount of at least one tris (hydroxyphenyl) lower alkane compound; the amount of said binder resin being about 60% to 95% by weight, the amount of said photoactive component being about 5% to about 40% by weight, based on the total solids content of said radiation-sensitive composition.
申请公布号 US5215856(A) 申请公布日期 1993.06.01
申请号 US19890409221 申请日期 1989.09.19
申请人 OCG MICROELECTRONIC MATERIALS, INC. 发明人 JAYARAMAN, TRIPUNITHURA V.
分类号 G03F7/022 主分类号 G03F7/022
代理机构 代理人
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