| 摘要 |
<p>A charged particlee analyser (1) comprises an inner electrode (2) and an outer electrode (3) defining a gap between opposed curved surfaces of the electrodes for the passage of charged particles deflected on application of an electric field from a source to a detector (12) in surface analysis techniques. The electrodes are preferably hemispherical or part-hemispherical and are formed from a sheet of metal by a pressing technique. Preferably the electrodes (2, 3) are each formed to a tolerance of within about 0.13 mm so as to achieve a high transmission at a high resolution. A base plate (4) for the electrodes (2, 3) is preferably formed of two spaced, relatively thin sheets (29, 30) joined at a plurality of discrete points.</p> |
