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摘要
申请公布号
DE3722080(C2)
申请公布日期
1993.05.27
申请号
DE19873722080
申请日期
1987.07.03
申请人
CANON K.K., TOKIO/TOKYO, JP
发明人
IWATA, YOSHIKI, YAMATO, KANAGAWA, JP
分类号
G03F7/00;G03F7/16;H01L21/00;H01L21/677;H01L21/687
主分类号
G03F7/00
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代理人
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