METHOD OF MICRO-WORKING THE SURFACE OF A WORKPIECE WHILE USING A LASER BEAM

摘要

PCT No. PCT/NL89/00050 Sec. 371 Date Nov. 8, 1990 Sec. 102(e) Date Nov. 8, 1990 PCT Filed Jun. 16, 1989 PCT Pub. No. WO89/12525 PCT Pub. Date Dec. 28, 1989.A micro-working of the surface is obtained by focussing a laser beam on a surface of a workpiece and subjecting the laser beam and the workpiece to a relative reciprocating movement in which material evaporates from the surface while forming a plasma plume. The relative movement of the laser beam and the workpiece occurs in steps smaller than the diameter of the focus of the laser beam, so that the laser beam moves over the same piece of surface area in an overlapping manner and radiates the same.