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发明名称
DRY ETCHING METHOD
摘要
申请公布号
EP0516053(A3)
申请公布日期
1993.05.26
申请号
EP19920108858
申请日期
1992.05.26
申请人
SONY CORPORATION
发明人
KADOMURA, SHINGO
分类号
H01L21/302;H01L21/3065;H01L21/311;H01L21/768;(IPC1-7):H01L21/311;H01L21/28;H01L21/90
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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