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发明名称
PROCESS AND APPARATUS FOR VACUUM COATING BY MEANS OF AN ELECTRIC ARC DISCHARGE
摘要
申请公布号
EP0285745(B1)
申请公布日期
1993.05.26
申请号
EP19880100362
申请日期
1988.01.13
申请人
BALZERS AKTIENGESELLSCHAFT
发明人
BUHL, RAINER, DR.;PEYER, CHRISTOF
分类号
C23C14/24;C23C14/32
主分类号
C23C14/24
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代理人
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