SOFT MAGNETIC FILM, MAGNETIC FILM PART USING THE SAME, AND MANUFACTURING METHOD FOR SOFT MAGNETIC FILM

摘要

PROBLEM TO BE SOLVED: To provide a soft magnetic film with magnetically isotropic soft magnetic film formed from ferrite particles of less than 1 μm in average grain diameter.SOLUTION: The soft magnetic film has ferrite particles of 5-800 nm in average grain diameter and is magnetically isotropic. Preferably, the average grain diameter of each of the ferrite particles is 10-500 nm. Preferably, a film thickness of the soft magnetic film is 500 nm or more, saturation magnetization is 0.2 T or more and magnetic coercive force is 40 A/m or less. Further, a film forming technology using a supersonic velocity gas flow is suitable.SELECTED DRAWING: Figure 1