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发明名称
SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
摘要
申请公布号
JPH05129537(A)
申请公布日期
1993.05.25
申请号
JP19910318549
申请日期
1991.11.07
申请人
TOSHIBA CORP
发明人
TAGUCHI MINORU
分类号
H01L21/76;H01L21/331;H01L21/8228;H01L27/082;H01L29/205;H01L29/73;H01L29/737
主分类号
H01L21/76
代理机构
代理人
主权项
地址
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