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发明名称
WAFER CRYSTAL DEFECT DETECTING EQUIPMENT
摘要
申请公布号
JPH05129403(A)
申请公布日期
1993.05.25
申请号
JP19910291394
申请日期
1991.11.07
申请人
TOSHIBA CORP
发明人
SEKIGUCHI SHINGO;YAMAGUCHI HIROSHI
分类号
H01L21/66
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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